Lanthanum La
Granulated yttrium oxide is a highly pure yttrium oxide spray coating material that is agglomerated and sintered.
The particle size distribution is strictly controlled, and it has superior flowability and spray characteristics.
The granulated yttrium oxide coating is also stable at high temperatures and can resist many active molten metals.
Granulated yttrium oxide coating has excellent electrical insulation and plasma corrosion resistance, and can be
applied to plasma etching machine protective coatings in semiconductor manufacturing, lithium battery sintering
bowls, hard alloy graphite fired plates, etc. Different particle sizes of granulated yttrium oxide can be customized
according to customer requirements.
Chemical formula: Y2O3
Particle size: 10 μ m-60 μ m，D50 can be customized according to customer needs
Appearance: White powder
Particle morphology: spherical
Loose density: 1.6-1.7g/cm3
Compaction density: 2-2.1g/cm3
Product purity: 99.999%
Liquidity index: 80.00
Liquidity evaluation：good
Jet flow index：64
Jet flow evaluation：strong
The chemical properties of Y2O3 are very stable, with excellent resistance to plasma etching, and the reaction product YF3 generated by CF gas has a low vapor pressure, making it difficult to disperse as particles. Y2O3 coating can effectively solve various problems faced by Al2O3 coating. With the international development of high-end mass-produced chips from 14 nanometers to 10 nanometers towards 7 nanometers, 5 nanometers, and even smaller, the plasma etching power has further increased, and protective coating materials YF3, Y5O4F7, and YAG with higher resistance to plasma erosion have also entered the stage of use. Currently, the coating materials that resist plasma corrosion coexist with Al2O3, Y2O3, YF3, Y5O4F7, and YAG.
The current mainstream ceramic spraying materials are 7.5% YSZ or 7.5% Y2O3+92.5% ZrO2, with a small amount of trial products being rare earth zirconate.
Application fields of granulated yttrium oxide：
Semiconductor and LCD panel etching machine plasma corrosion resistant coating materials, thermal barrier
coating materials for aircraft engines, manufacturing high-temperature heat-resistant alloy aircraft nozzles, etc
We are manufacturer. We can provide one-stop solution of products, technology and R&D according to customers' requirements.
RECHEM was founded by experienced entrepreneurs in the rare earths and rare metals industry. We have decades of extensive industry and import/export experience..
Products are available in stock for fast customs clearance and shipment.
We have a QC department to keep a strict check on the quality of our products.
Packaging and labeling are available upon your request, neutral or specified.
Our products include rare earths, non-ferrous metals and recycling.
